DXT8 series-High and low temperature vacuum magnetic field probe station

DXT8 series-High and low temperature vacuum magnetic field probe station

Introduction:

The high and low temperature vacuum magnetic field probe station is a high-precision test bench for high and low temperature, vacuum and magnetic field environments. Many of its designs are very special. Therefore, the configuration of the high and low temperature magnetic field probe station is mainly selected and designed according to the needs of users. For example, the required magnetic field value, the size of the uniformity zone, the size of the uniformity and the size of the sample stage are all related to the magnetic flux density generated by the magnetic field lines in a certain area; the displacement stage can also be equipped with magnetic fluid seals to realize the sample stage The horizontal direction of the two-dimensional movement and 360-degree rotation; therefore, this type of probe station is mainly designed and optimized according to the customer's usage. Widely used in the semiconductor industry, MEMS, superconductivity, electronics, ferroelectronics, physics, materials science, biomedicine and other fields.

Vacuum chamber observation window Parameter:

Dimension(inch)	1	1.5	2
Number of probe arms	2、4、6、8 optional
Window material	Fused quartz (optional K9, calcium fluoride, etc.)
Mechanical accuracy	10μm/2 μm/1μ m/0.7μ m
Probe diameter	0.51mm
Flared form	Ordinary vacuum joint / triaxial joint BNC / SMA, etc
Supply voltage	AC220V 50Hz 60Hz	AC380V 50Hz/60Hz

Instrument parameters:

Model	T8LY-100	T8LY-130	T8LY-180
vacuum degree	Maximum vacuum 10-8pa
Power stability	50ppm optional 10ppm
Refrigeration mode	Liquid helium and liquid nitrogen refrigeration closed cycle refrigerator
temperature range	5k-325k optional 500K
Power Supply	Bipolar power supply 50A	Bipolar power supply 70A	Bipolar power supply 90A
Sample table size (max)	Medium 50mm, flatness ≤ 7 μ  m
Microscope stroke	10. Y plane 2 * 2inch, accuracy 1 μ m. Z-axis stroke > 50.8mm
Magnification	16~100X/20-4000X

Note:

※The maximum need to measure a few inches of wafers or devices! Do you need to test fragments or single chips! The smallest single chip size!

※How high is the mechanical precision requirement of the probe station!

※Point to measure the electrode size of the sample! 100μm *100μm or 60μm *60μm pad, or mini pad made by FIB, or metal circuit inside ic!

※At most, several probes are needed to measure at the same time!

※Whether the probe card test will be used!

※How much do you need to use the minimum resolution of an optical microscope!

※For the microscope, do you need to add a polarizer for LC liquid crystal hot spot detection!

※During the probe point measurement, whether the current requirement reaches 100fa or below! Low

Is the capacitance requirement to be 0.1pf! Is there RF demand!

※What are the test instrument interfaces connected!

※Whether heating or cooling is needed when testing the environment! Do you need to seal the cavity!

※How about the leakage requirements of chuck! Do you need to add low impedance chuck!

※Do you need a shockproof table!

※If an anti-vibration table is added, is there compressed air