DXT8 Three dimensional magnetic field probe station

DXT8 Three dimensional magnetic field probe station

Introduction:

The one-dimensional, two-dimensional, and three-dimensional magnetic field probe platforms provided by the company are all made of non-magnetic materials. Three pairs of one-dimensional, two-dimensional and three-dimensional Helmholtz coils are placed orthogonally to generate one-dimensional, two-dimensional and three-dimensional magnetic fields. The coil can be air-cooled (small magnetic field) or water-cooled (large magnetic field), and is equipped with a coil overheating protection device. The output current of each dimension can be controlled by the buttons on the software or the power control panel, and the vector magnetic field in any direction in space can be generated. The probe stage is equipped with a movable sample stage, which can realize two-dimensional movement and 360-degree rotation of the sample stage in the horizontal direction, which is convenient for sample installation and testing. The probe station has four high-precision probe arms and a high-precision electron microscope to facilitate the observation and operation of small samples. The probe can test chips, wafers, packaged devices, etc. through DC or low-frequency AC signals.

Application scope:

It is widely used in the fields of semiconductor industry, MEMS, superconductivity, electronics, ferroelectronics, physics, materials science and biomedicine. The three-dimensional probe station is matched with the high-precision bipolar power supply independently developed by our company. Through the output of the true bipolar power supply, the vector field synthesis in any direction in space is realized.

Parameter:

Model	T8-500-3	T8-300-3	T8-100-3
Material	all models are non-magnetic
Magnetic field range	500Gs	300Gs	100Gs
Magnetic field uniformity	1% in 50mm sphere in central area
Angular resolution	0.02°
Probe length	38mm
Probe diameter	0.15mm
tip diameter	10μm/5μm/1μm
Microscope	10. Y-plane 2 * 2inch, accuracy 1 um, z-axis stroke ≥ 50.8mm, optional laser loading

Note:

※The maximum need to measure a few inches of wafers or devices! Do you need to test fragments or single chips! The smallest single chip size!

※How high is the mechanical precision requirement of the probe station!

※Point to measure the electrode size of the sample! 100μm *100μm or 60μm *60μm pad, or mini pad made by FIB, or metal circuit inside ic!

※At most, several probes are needed to measure at the same time!

※Whether the probe card test will be used!

※How much do you need to use the minimum resolution of an optical microscope!

※For the microscope, do you need to add a polarizer for LC liquid crystal hot spot detection!

※During the probe point measurement, whether the current requirement reaches 100fa or below! Low

Is the capacitance requirement to be 0.1pf! Is there RF demand!

※What are the test instrument interfaces connected!

※Whether heating or cooling is needed when testing the environment! Do you need to seal the cavity!

※How about the leakage requirements of chuck! Do you need to add low impedance chuck!

※Do you need a shockproof table!

※If an anti-vibration table is added, is there compressed air